Wafer Size: 2” to 12”
Temperature Range: 0℃ - 1100 ℃ ? Number of Temperature Points: 1-34” depends on wafer size
Temperature Accuracy: Class 1, ~0.4%
Sensor Type: K, R, S, PL II
Calibration: traceable to NIST, JEMIC
Feed Through: Polyimide flat cable with seal under chamber
Connector Type: D, U, M, or none
Lead Insulation: Polyimide, PFA Teflon, Silica Sleeve, Quartz Micro Tubes and others