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TC wafer

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8寸晶圓盒SMIF POD

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熱電偶

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Implant石墨部件

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CMP Brush

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Graphite & SiC & Ceramic Parts for Implant Process

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Brush / Retaining Ring

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晶圓盒 200 mm SMIF POD

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C-Type Thermocouple

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Wafer Size: 2” to 12”Temperature Range: 0℃ - 1100 ℃ ? Number of Temperature Points: 1-34” depends on wafer sizeTemperature Accuracy: Class 1, ~0.4%Sensor Type: K, R, S, PL IICalibration: traceable to NIST, JEMICFeed Through: Polyimide flat cable with seal under chamber Connector Type: D, U, M, or none Lead Insulation: Polyimide, PFA Teflon, Silica Sleeve, Quartz Micro Tubes and others
TC Wafer

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Wafer Size: 2” to 12”Temperature Range: 0℃ - 1100 ℃ ? Number of Temperature Points: 1-34” depends on wafer sizeTemperature Accuracy: Class 1, ~0.4%Sensor Type: K, R, S, PL IICalibration: traceable to NIST, JEMICFeed Through: Polyimide flat cable with seal under chamber Connector Type: D, U, M, or none Lead Insulation: Polyimide, PFA Teflon, Silica Sleeve, Quartz Micro Tubes and others
SPIKE

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Wafer Size: 2” to 12”Temperature Range: 0℃ - 1100 ℃ ? Number of Temperature Points: 1-34” depends on wafer sizeTemperature Accuracy: Class 1, ~0.4%Sensor Type: K, R, S, PL IICalibration: traceable to NIST, JEMICFeed Through: Polyimide flat cable with seal under chamber Connector Type: D, U, M, or none Lead Insulation: Polyimide, PFA Teflon, Silica Sleeve, Quartz Micro Tubes and others
LEDK Thermocouple

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Wafer Size: 2” to 12”Temperature Range: 0℃ - 1100 ℃ ? Number of Temperature Points: 1-34” depends on wafer sizeTemperature Accuracy: Class 1, ~0.4%Sensor Type: K, R, S, PL IICalibration: traceable to NIST, JEMICFeed Through: Polyimide flat cable with seal under chamber Connector Type: D, U, M, or none Lead Insulation: Polyimide, PFA Teflon, Silica Sleeve, Quartz Micro Tubes and others
Profile Thermocouple

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Wafer Size: 2” to 12”Temperature Range: 0℃ - 1100 ℃ ? Number of Temperature Points: 1-34” depends on wafer sizeTemperature Accuracy: Class 1, ~0.4%Sensor Type: K, R, S, PL IICalibration: traceable to NIST, JEMICFeed Through: Polyimide flat cable with seal under chamber Connector Type: D, U, M, or none Lead Insulation: Polyimide, PFA Teflon, Silica Sleeve, Quartz Micro Tubes and others
General Purpose TC

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?Wafer Size: 2” to 12”Temperature Range: 0℃ - 1100 ℃ ? Number of Temperature Points: 1-34” depends on wafer sizeTemperature Accuracy: Class 1, ~0.4%Sensor Type: K, R, S, PL IICalibration: traceable to NIST, JEMICFeed Through: Polyimide flat cable with seal under chamber Connector Type: D, U, M, or none Lead Insulation: Polyimide, PFA Teflon, Silica Sleeve, Quartz Micro Tubes and others